Past conferences
| Year | Location | General Chairs |
|---|---|---|
| Optical MEMS and Nanophotonics 2024 | San Sebastián, Spain | Andreas Seifert Frederic Zamkotsian Wei-Chuan Shih Yoshihiro Taguchi |
| Optical MEMS and Nanophotonics 2023 | Campinas, Brazil | Hugo Hernandez-Figueroa |
| Optical MEMS and Nanophotonics 2022 | Online Conference | Onur Ferhanoğlu Wibool Piyawattanametha John X. Zhang |
| Optical MEMS and Nanophotonics 2021 | Online Summer School | Joseph Talghader Guangya Zhou Harald Schenk |
| Optical MEMS and Nanophotonics 2020 | Cancelled due to COVID-19 | |
| Optical MEMS and Nanophotonics 2019 | Daejeon, South Korea | Ki-Hun Jeong |
| Optical MEMS and Nanophotonics 2018 | Lausanne, Switzerland | Niels Quack |
| Optical MEMS and Nanophotonics 2017 | Santa Fe, New Mexico, USA | Vladimir Aksyuk |
| Optical MEMS and Nanophotonics 2016 | Singapore, Singapore | Chengkuo Lee |
| Optical MEMS and Nanophotonics 2015 | Jerusalem, Israel | Dan Marom |
| Optical MEMS and Nanophotonics 2014 | Glasgow, Scotland, UK | Deepak Uttamchandani Andreas Seifert Aaron Danner |
| Optical MEMS and Nanophotonics 2013 | Kanazawa, Japan | Minoru Sasaki |
| Optical MEMS and Nanophotonics 2012 | Banff, Alberta, Canada | David L. Dickensheets |
| Optical MEMS and Nanophotonics 2011 | Istanbul, Turkey | Hakan Ürey |
| Optical MEMS and Nanophotonics 2010 | Sapporo, Japan | Hiroshi Toshiyoshi |
| Optical MEMS and Nanophotonics 2009 | Clearwater, Florida, USA | Lih Y. Lin |
| Optical MEMS and Nanophotonics 2008 | Freiburg, Germany | Hans Zappe |
| Optical MEMS and Nanophotonics 2007 | Hualien, Taiwan | J. Andrew Yeh |
| Optical MEMS 2006 | Big Sky, Montana, USA | Joseph Talghader |
| Optical MEMS 2005 | Oulu, Finland | Harri Kopola David L. Dickensheets Hiroshi Miyajima |
| Optical MEMS 2004 | Takamatsu, Japan | Kazuhiro Hane |
| Optical MEMS 2003 | Waikoloa, Hawaii, USA | Olav Solgaard Joseph Talghader |
| Optical MEMS 2002 | Lugano, Switzerland | Hans Peter Herzig Hideto Iwaoka Norman C. Tien |
| Optical MEMS 2001 | Okinawa, Japan | Renshi Sawada Ruergen Mohr Lih Y. Lin |
| Optical MEMS 2000 | Kauai, Hawaii | Joe Ford Klas Hjort Renshi Sawada |
| Optical MEMS 1999 | Mainz, Germany | Wolfgang Ehrfeld |
| Optical MEMS 1998 | Monterey, California, USA | James Walker Ming C. Wu |
| Optical MEMS 1997 | Nara, Japan | Nico de Rooij Hiroyuki Fujita |
| Optical MEMS 1996 | Keystone, Colorado, USA | Ming C. Wu Nico de Rooij Susanne Arney |